Nano-manufacturing and Micro/Nano-electro-mechanical System

Dr Larry Lu (CECS, RSE)


DATE: 2013-11-18
TIME: 16:00:00 - 17:00:00
LOCATION: Graduate Teaching Room (Ian Ross Building)
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High-throughput nano-manufacturing technology at low cost, is always critical and challenging, to realize the fabrication of reliable, repeatable, and scalable micro-/nano- devices. In this talk, I will firstly present a novel nanolithography system, named as RadioIsotope-powered Parallel Electron Lithography (RIPEL), which uses large-area planar radioactive I-electron thin film emitters to parallel expose e-beam resist through a stencil mask. RIPEL enables large area massively parallel electron lithography with both high throughput and high resolution (75 nm resolution). As an example, RIPEL system was used to realize nano-structure array based low-cost solar energy harvesting.

MEMS/NEMS (Micro/Nano Electro-Mechanical System) technology, which integrates various micro/nano-sale sensors and actuators on a single chip, are becoming important as biological probes for molecule level mechanical sensing and manipulation. Bio-molecule sensing at low concentration (e.g. sub-femtomolar level) is important for early-stage disease diagnosis, such as cancer. In the second part of the talk, I will present a low-concentration (500 aM sensitivity) DNA sensor, which uses a nano-mechanical resonator with ordered vertical nanowire arrays on top of a Si/SiO2 bilayer thin membrane. The high sensitivity is achieved by the strongly enhanced total surface area-to-volume ratio of the resonator (108 m-1) and the state-of-the-art mass-per-area resolution. Moreover, the nanowire array forms a photonic crystal that shows strong light trapping and absorption over broad-band optical wavelengths, enabling high-efficiency broad-band opto-thermo-mechanical remote device actuation and bio-sensing on a chip. This method represents a mass-based platform technology that can sense molecules at low concentrations.

In the end of the talk, I will briefly talk about MEMS resonators/sensors based on novel 2D nano-materials, such as grapheme and MoS2.

Dr. Yuerui (Larry) Lu received his Ph.D. degree from Cornell University, the school of Electrical and Computer Engineering in 2012. He holds a B.S. degree in Applied Physics from University of Science and Technology of China. In 2013, he joined the Australian National University as a research fellow and lecturer under the Future Engineering Research Leadership Fellowship. Before that, he worked as a postdoctoral research associate in SonicMEMS Laboratory at Cornell University. His research interests include MEMS/NEMS sensors and actuators, nano-manufacturing technologies, renewable energy harvesting, biomedical novel devices, nano-materials, and nano-electronics. (

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