Micro & Nano Systems

Micro & Nano Systems

The creation of smart micro- and nano-electro-mechanical systems (MEMS/NEMS), by integrating tiny devices, can enable many advanced functionalities, ranging from computing, sensing and communications, to energy harvesting. MEMS/NEMS can sense, control and activate microscopic mechanical processes, and function individually or in arrays to generate effects on the macro scale. These devices are used in diverse applications, such as display technologies, sensor systems, optical networks, energy harvesting and biomedical probes.

Our investigations in this exciting field address nanoscale science and technology, namely MEMS/NEMS, nano-manufacturing, energy harvesting and biomedical sensing. We conduct multidisciplinary research, combining electrical engineering, mechanical engineering, applied physics, materials science, chemistry and biomedical sciences. Our research topics are cover high-throughput nano-manufacturing technology, novel NEMS-based biomedical devices, nonlinearity engineering for NEMS, high-efficiency nano-structured thin-film solar cells and NEMS with new two dimensional nano-materials.

Explore our available student research projects below and if you’d like to discuss opportunities for collaboration or funding, please email us.

Academic staff

Associate Professor Yuerui (Larry) Lu »

Associate Professor and ARC DECRA Fellow

Dr Hieu Nguyen »

Senior Research Fellow & Senior Lecturer, NECTAR Co-chair, Fellow, Higher Education Academy (FHEA)

Dr Ankur Sharma »


Dr Juan Felipe Torres »

Research Fellow

Antonio Tricoli

Professor Antonio Tricoli »

Group Leader, Nanotechnology Research Laboratory


Zain Ul Abideen

Zain Ul Abideen »

PhD Student

Mudassar Nauman »

HDR Student

Mike Tebyetekerwa »

PhD Candidate

Mr Thien Truong »

PhD Candidate


Mr Jiajie Pei

Mr Jiajie Pei »

Occupational Trainee

Dr Jing Wang

Dr Jing Wang »

Visiting Fellow

Bo Wen »

Campus Visitor

Mr Linglong Zhang »

Campus Visitor

Ankur presenting at ANN workshop

24 Jul 2017
PhD Student wins first prize at Australian Nanotechnology Network Entrepreneurship Workshop.
Larry Lu
11 Mar 2016
ANU engineers have created the world's thinnest lens, one two-thousandth the thickness of a human hair, opening the door to flexible computer displays and a...
Research in rhyme wins Famelab people’s choice award
1 Jun 2015
ANU Engineering student Kiara Bruggeman has won the people's choice prize at the Famelab Australia science communications awards by presenting her research in rhyme...

Updated:  1 June 2019/Responsible Officer:  Dean, CECS/Page Contact:  CECS Marketing